Long-term reliability degradation of ultrathin dielectric films due to heavy-ion irradiation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Transactions on Nuclear Science
سال: 2002
ISSN: 0018-9499,1558-1578
DOI: 10.1109/tns.2002.805389